EXE-FLOWTM was commercialized “Exact measurement” and “Excellent function as a concept. This is covered from a small flow rate (F.S.10sccm) to a large flow rate (F.S.200slm) and the 11 flow ranges are ready as s standard stock.
- Lower cost model with newly developed high-grade sensor
- Compact and lightweight、24CDC drive.
- RS485 communication is the standard spec.
- Compliant to RoHS and CE marked.
- Easy operation with indicator.
- Instant and totalized flow rate indication
- Change of gas type
- Conversion factor setting
- Upper or lower alarm setting
- Change of the unit of flow range, etc.
- Accurate flow measurement and Excellent function
- Full scale 10sccm to 200SLM
- 11 Range standard stock for fast delivery
- Single power supply connection
|Sensor type||Thermal (EX sensor)|
|Flow range(N2)||10 /50 /100 /500SCCM 1 /5 /10 /20SLM||50 /100 /200SLM|
|Applicable gases（*1）||N2(Air, H2, He, Ar, O2, CO2, and C.F.)||N2(Air, Ar, and C.F.)|
|Accuracy（*2）||± 1.0%F.S. (25℃ )||± 1.5%F.S.(25℃ )|
|Temperature coefficient||± 0.2%F.S./℃ (15 ～ 35℃ ) ※ 200SLM ± 0.4%F.S./℃|
|Proof pressure||980 ｋ Pa(G)|
|Working Temp.||5 ～ 50℃|
|Allowable storage temp.||-10 ～ 60℃|
|Materials of a gas contact part||SUS316, SUS316L, PTFE, FKM (optional NBR,CRP)|
|Electrical connection||DC power plug and D-sub 9 pin male|
|Digital communication||RS485（MODBUS protocol, RTU mode）|
|Required power supply (DC)||24VDC( ± 10%) 100mA|
|Joint||1/4F900 (standard)||3/8F900 (standard)|
|Needle valve (option)||MODEL2412||MODEL2412D|
|Signal||Event output||2 x NPN open collector output, integrating pulse output (Maximum rating DC30V 50mA)|
|Flow output（*3)||① 4 ～ 20mA ② 0 ～ 5V ③ 1 ～ 5V|
|Weight||Approx. 600g (without fittings)||Approx. 700g (without fittings)|
Datasheet: KOFLOC EX-700 Digital Mass Flow Meter