In comparison with the conventional mechanical products, the mass flow measurement/control technology used in a mass flow meter and controller extracts electrical signals from the flow without significantly influencing the temperature or pressure, thus permitting sophisticated flow measurement and control. The technology is widely used for manufacturing semiconductors, liquid crystal, optical fibers and other electronic devices, gas supply for fuel cells, and fuel gas control for burners, foods, biotechnology, as well as for experimental facilities and production/inspection systems in many other industries.
- Metal sealing design
- Lower cost but high accuracy measurement.
- High-speed response and zero stability.
- 0-5VDC or 4-20mA input/output signal and +/-15VDC or 24VDC power supply.
- Mediocrity D-sub 9pin.
- Gases registered in EX-550 are usable by rotary-switch.
*Calculate the flow rate with a conversion factor based on N2 gas.
- RoHS compliance, CE marked
|Model||Mass Flow Controller||Mass Flow Meter|
|Sensor type||Thermal sensor|
|Valve type||Normally closed proportional solenoid valve||–|
|Applicable gases（*1）||N2、Air、H2、He、Ar、O2、CO2 etc.|
|(Gases not specifically mentioned here are subject to calibration for N2 equivalent.)|
|Flow range（*2）||10SCCM ～ 5SLM|
|Control（measure）range||2 ～ 100%(F.S.)|
|Response||≤ 1sec （within ± 2%F.S.）（*4）|
|Accuracy||± 1.0%S.P. (25%F.S. ～ 100%F.S.) , ± 0.25%F.S. ( ～ 25%F.S.)|
|Operating differential pressure（*3）||50 ～ 300kPa（Ar、CO2：１00kPa ～ 300kPa）||–|
|Inlet maximum pressure||350kPa（G）|
|External leak rate（He）||≤ 1.0 × 10-11Pa・m3/sec|
|Temperature||Working temp.||5 ～ 50℃|
|Accuracy guaranteed temp.||15 ～ 35℃|
|Allowable storage temp.||-10 ～ 60℃|
|Allowable operating humidity||10 ～ 90%RH（without dew condensation）|
|Materials of a gas contact part||SUS316L、PTFE、Ni-Co|
|Electrical connection||Dsub 9pin KFC Standard（SEMI standard is compliant）|
|HR-10A × 2|
|Flow rate setting signal||0～5VDC(input impedance: approx. 1M Ω)||–|
|or 4～20mA(input impedance: approx. 250 Ω)|
|Flow rate output signal||0 ～ 5VDC( load resistance ≧10k Ω)|
|or 4 ～ 20mA( load resistance ≧500 Ω)|
|Digital communication||RS485 rotary-switch address setting|
|Required power supply (DC)||+15VDC( ± 5%)100mA , -15VDC（± 5%）150mA|
|or +24VDC（± 10%） ≤180mA (MFM would be ≤100mA)|
（*1） The gases must be dry and clean, free of corrosive components and foreign matter such as dust and mist.
（*2） The flow rate calibration units SCCM and SLM indicate a mass flow rate converted to a volume flow rate in cc/min and L/min at 0°C and 1 atm.
（*3） The operating differential pressure may differ depending on specifications.
（*4） Pressure condition would be needed when you order.