Kofloc 6610 Series Pressure Regulator Valve Precision Regulator has been developed for better repeatability and quick, reliable pressure regulation by increasing the accuracy of the low-pressure side compared with the Model 6600. It is ideal for high-sensitivity analyzers and semiconductor manufacturing equipment, as well as for research and development.
Kofloc 6610 Series Features
- High-precision regulation on the low-pressure side, High regulation performance with repeatability of ±1% or less when the pressure on the primary side and load resistance on the secondary side change under the set pressure condition of 0.01–0.15 MPa.
- Non-grease specification, The sections in contact with gas are made of stainless steel, Viton, and Teflon without using grease. This valve is ideal for the semiconductor industry which requires ultra-clean conditions.
- Locknut, The regulating position, once it has been set, can be fixed by a lock nut to prevent the setting from changing.
- Non-bleed type, This non-bleed type valve prevents gas from leaking to the outside
- Gas chromatography
- High-purity gas control
- Low-pressure controllers
- Semiconductor industry
|Maximum primary pressure||0.4MPa|
|Secondary control pressure||0.01-0.15MPa|
|Minimum operating differential||0.1 MPa or more|
|Materials of parts in contact with gases||SUS316, FKM, fluorocarbon resin, SUS304, SUS303|
|Repeatability||Within ±1% of the pressure rating|
|Materials of parts in contact with fluids||SUS316, FKM, fluorocarbon resin, SUS304, SUS303|