Kofloc Pressure Regulator Valve Model 6610 | Descriptions
This valve has been developed for better repeatability and quick, reliable pressure regulation by increasing the accuracy of the low-pressure side compared with the Model 6600. It is ideal for high-sensitivity analyzers and semiconductor manufacturing equipment, as well as for research and development.
Features
- High-precision regulation on the low-pressure side, High regulation performance with repeatability of ±1% or less when the pressure on the primary side and load resistance on the secondary side change under the set pressure condition of 0.01–0.15 MPa.
- Non-grease specification, The sections in contact with gas are made of stainless steel, Viton, and Teflon without using grease. This valve is ideal for the semiconductor industry which requires ultra-clean conditions.
- Locknut, The regulating position, once it has been set, can be fixed by a lock nut to prevent the setting from changing.
- Non-bleed type, This non-bleed type valve prevents gas from leaking to the outside
Application
- -Gas chromatography
- High-purity gas control
- Low-pressure controllers
- Semiconductor industry
Standard Specifications
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Fluids
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Various gases
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Maximum primary pressure
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0.4MPa
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Secondary control pressure
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0.01-0.15MPa
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Maximum flow
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5L/MIN
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Minimum operating differential
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0.1 MPa or more
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Materials of parts in contact with gases
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SUS316, FKM, fluorocarbon resin, SUS304,
SUS303
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Proof pressure
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0.8MPa
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Repeatability
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Within ±1% of the pressure rating
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Heat resistance
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5°C-60°C
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Connection end
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Rc1/8
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Materials of parts in contact with fluids
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SUS316, FKM, fluorocarbon resin, SUS304, SUS303
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