Kofloc RK1500 Series Flow Meter with Bellows Needle Valve

Kofloc RK1500 Series Flow Meter with Bellows Needle Valve is equipped with a bellows seal type needle valve so that it can withstand high vacuum, high pressure, high temperature, and toxic gases.

Kofloc RK1500 Series Features :

  • High reliability against leak is ensured because a 100% leak test is conducted before shipping, using a helium leak detector.
  • Bellows seal type needle valve perfectly eliminates leak from the valve stem.
  • Superior corrosion resistance is ensured by using SUS 316, FKM, fluorocarbon resin and Pyrex glass only for wetted parts and those which are exposed to other fluids.
  • Enhanced stability and repeatability are ensured using a flowmeter consisting of a precision-formed try-flat, rib-guided glass tube and ultra-precision ball float in combination with a sophisticated needle valve.

Applications :

  1. For vacuum systems
  2. For semiconductor manufacturing lines

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Kofloc RK1500 Series Standard Specifications :

  1.  Fluids
    • Gases: Air, N2, O2, H2, He, Ar, and CO2 (Calibration by actual gas)
    • For other gases, consultation is necessary regarding whether conversion conditions or calibration by actual gas is to be used.
    • Optional: Scale indicating two types of fluids
    • Liquids: Standard fluid: Water
    • For other liquids,
      • consultation is necessary regarding whether conversion conditions or calibration by actual liquid is to be used.
  1.  Flow range
    • Gases : 0.5-5 ML/MIN to 3-30 L/MIN (See the Capacity Table below.)
    • Optional: 0.5-3 ML/MIN
    • Liquids : 0.5-5 ML/MIN to 0.1-1 L/MIN (See the Capacity Table below.)* Optional: 0.5-3 ML/MIN
  2.  Accuracy
    • Gases : FS±2% (Measurement point)
  3.  Optional: FS±1% (Measurement point)
    • Liquids: FS±2% (Measurement point)
  4.  Proof pressure
    • Gases :  1.0 MPa for 100 ML/MIN or less 0.7 MPa for 5 L/MIN or less 0.5 MPa for 10 L/MIN or more
    • Liquids : 1.0 MPa for 5 ML/MIN or less 0.7 MPa for 150 ML/MIN or less 0.5 MPa for 200 ML/MIN or more
  5.  Available scale : 10:1
    • * Optional: 20:1
  6. Materials: SS
  7. Body block: SUS316
  8. Tapered tube: Pyrex®, glass
  9.  Packing: FKM, fluorocarbon resin
  10.  Float: Pyrex, SUS 316, glass
  11.  Protective cover: Acrylic resin
  12.  Temperature resistance: MAX60℃
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