Kofloc RK1500 Series Flow Meter with Bellows Needle Valve

Kofloc RK1500 Series Flow Meter with Bellows Needle Valve is equipped with a bellows seal type needle valve so that it can withstand high vacuum, high pressure, high temperature, and toxic gases.

Kofloc RK1500 Series Features :

• High reliability against leak is ensured because a 100% leak test is conducted before shipping, using a helium leak detector.
• Bellows seal type needle valve perfectly eliminates leak from the valve stem.
• Superior corrosion resistance is ensured by using SUS 316, FKM, fluorocarbon resin and Pyrex glass only for wetted parts and those which are exposed to other fluids.
• Enhanced stability and repeatability are ensured using a flowmeter consisting of a precision-formed try-flat, rib-guided glass tube and ultra-precision ball float in combination with a sophisticated needle valve.

Applications :

1. For vacuum systems
2. For semiconductor manufacturing lines

Kofloc RK1500 Series Standard Specifications :

1.  Fluids

• • Gases: Air, N2, O2, H2, He, Ar, and CO2 (Calibration by actual gas)
  • For other gases, consultation is necessary regarding whether conversion conditions or calibration by actual gas is to be used.
  • Optional: Scale indicating two types of fluids
  • Liquids: Standard fluid: Water
  • For other liquids,

1. • • consultation is necessary regarding whether conversion conditions or calibration by actual liquid is to be used.
2.  Flow range
   • Gases : 0.5-5 ML/MIN to 3-30 L/MIN (See the Capacity Table below.)
   • Optional: 0.5-3 ML/MIN
   • Liquids : 0.5-5 ML/MIN to 0.1-1 L/MIN (See the Capacity Table below.)* Optional: 0.5-3 ML/MIN
3.  Accuracy
   • Gases : FS±2% (Measurement point)
4.  Optional: FS±1% (Measurement point)
   • Liquids: FS±2% (Measurement point)
5.  Proof pressure
   • Gases :  1.0 MPa for 100 ML/MIN or less 0.7 MPa for 5 L/MIN or less 0.5 MPa for 10 L/MIN or more
   • Liquids : 1.0 MPa for 5 ML/MIN or less 0.7 MPa for 150 ML/MIN or less 0.5 MPa for 200 ML/MIN or more
6.  Available scale : 10:1
   • * Optional: 20:1
7. Materials: SS
8. Body block: SUS316
9. Tapered tube: Pyrex®, glass
10.  Packing: FKM, fluorocarbon resin
11.  Float: Pyrex, SUS 316, glass
12.  Protective cover: Acrylic resin
13.  Temperature resistance: MAX60℃

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