Kofloc 5100 Series High Grade Mass Flow Controllers

Kofloc 5100 Series High Grade Mass Flow Controllers

Kofloc 5100 Series High-Grade Mass Flow Controllers ≤±1%, the response of ≤±1 second, and other basic performance conditions required for semiconductor process control, and additionally, has achieved a significant price reduction.

Kofloc 5100 Series Features

  • High accuracy and high response are achieved by the flow sensors with temperature- following current difference detection.
  • A normally-closed solenoid valve is employed.
  • A low leak rate is achieved by the weldless structure and metal seal.
  • The dead volume is reduced thanks to the diaphragm seat valve.-
  • The face-to-face and body dimensions and the wiring tie-in points are designed to facilitate the replacement of devices made by other companies.

Standard Specifications

  • Flow range(N2 equivalents, 06 ℃/1 atm): 1 SCCM – 20 SLM (The conditions are freely selectable)
  • Sensor: Thermal mass flow sensor
  • Valve type: Proportional solenoid valve (closed when not energized)
  • Control range: 2 – 100% (Porto)
  • Response: 1 sec. or less (0 – 100% within ± 2% typical)
  • Accuracy: ± 1% of Porto (Accuracy guaranteed at 15-35 ℃)
  • Repeatability: ± 0.2% of Porto
  • Operating differential pressure port:
    * ≤ 5 SLM: 50 – 300 kPa
    * Porto 5 > SLM: 100 – 1000 kPa
    * Option: Low differential pressure (LP) specification is available depending on conditions.
  • Allowable operating pressure: 300 kPa (G) or less
  • Pressure-Proof: 980 kPa (G)
  • Leak rate: 1 × 10-11 Pa • m3/s or less
  • Allowable ambient temperature: 0-50 ℃
  • Allowable ambient humidity: 10 & ndAsh; 90% (No condensation allowed)

Another Article:

Materials of the parts in contact with gases:

  • Body: SUS316L
  • Diaphragm:
    * Valve seat: PTFE
    * Sealing: SUS316L, Ni, Au
    * Option: SUS seal (SU), inner surface polish (KP)
  • Electric connection: 9-pin Dsub connector as per Standard KFC (Compliant with SEMI Standard)
  • Flow rate input signals: 0-5 VDC (Input impedance: 1 MΩ or more)
  • Flow rate output signals: 0-5 VDC (External load resistance: 250 kΩ or more)
  • Required power supply: +15 VDC (±5%) 100 mA, −15 VDC (±5%) 200 mA
  • Joint (Main unit bore) : Standard: 1/4 VCR equivalent Option: 1/4 SWL
  • Weight: Approx. 1000 g
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