Kofloc RK1500 Flow Meter

Kofloc RK1500 Flow Meter | Bellows Needle Valve

Kofloc RK1500 Flow Meter
Kofloc RK1500 Flow Meter

RK1500 Series

The Model RK1500 Series Flowmeter is equipped with a bellows seal type needle valve so that it can withstand high vacuum, high pressure, high temperature, and toxic gases.

Feature

  • High reliability against leak is ensured because a 100% leak test is conducted before shipping, using a helium leak detector.
  • Bellows seal type needle valve perfectly eliminates leak from the valve stem.
  • .Superior corrosion resistance is ensured by using SUS 316, FKM, fluorocarbon resin and Pyrex glass only for wetted parts and those which are exposed to other fluids.
  • Enhanced stability and repeatability are ensured using a flowmeter consisting of a precision-formed try-flat, rib-guided glass tube and ultra-precision ball float in combination with a sophisticated needle valve.

Applications

  • For vacuum systems
  • For semiconductor manufacturing lines

Standard Specifications

  • Fluids
    Gases: Air, N2, O2, H2, He, Ar, and CO2 (Calibration by actual gas)
    For other gases, consultation is necessary regarding whether conversion conditions or calibration by actual gas is to be used.
    * Optional: Scale indicating two types of fluids
    Liquids: Standard fluid: Water
    For other liquids, consultation is necessary regarding whether conversion conditions or calibration by actual liquid is to be used.
  • Flow range
    • Gases: 0.5-5 ML/MIN to 3-30 L/MIN (See the Capacity Table below.)
      * Optional: 0.5-3 ML/MIN
    • Liquids: 0.5-5 ML/MIN to 0.1-1 L/MIN (See the Capacity Table below.)
      * Optional: 0.5-3 ML/MIN
  • Accuracy
    • Gases: FS±2% (Measurement point)
      * Optional: FS±1% (Measurement point)
    • Liquids: FS±2% (Measurement point)
  • Proof pressure
    • Gases: 1.0 MPa for 100 ML/MIN or less
      0.7 MPa for 5 L/MIN or less
      0.5 MPa for 10 L/MIN or more
    • Liquids: 1.0 MPa for 5 ML/MIN or less
      0.7 MPa for 150 ML/MIN or less
      0.5 MPa for 200 ML/MIN or more
      5.Available scale : 10:1 * Optional: 20:1
  • Materials: SS
  • Body block: SUS316
  • Tapered tube: Pyrex®, glass
  • Packing: FKM, fluorocarbon resin
  • Float: Pyrex, SUS 316, glass
  • Protective cover: Acrylic resin
  • Temperature resistance: MAX60℃

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