Kofloc RK1500 Flow Meterr is equipped with a bellows seal type needle valve so that it can withstand high vacuum, high pressure, high temperature, and toxic gases.
Kofloc RK1500 Feature
- High reliability against leak is ensured because a 100% leak test is conducted before shipping, using a helium leak detector.
- Bellows seal type needle valve perfectly eliminates leak from the valve stem.
- .Superior corrosion resistance is ensured by using SUS 316, FKM, fluorocarbon resin and Pyrex glass only for wetted parts and those which are exposed to other fluids.
- Enhanced stability and repeatability are ensured using a flowmeter consisting of a precision-formed try-flat, rib-guided glass tube and ultra-precision ball float in combination with a sophisticated needle valve.
Applications
- For vacuum systems
- For semiconductor manufacturing lines
Standard Specifications
- Fluids
- Gases: Air, N2, O2, H2, He, Ar, and CO2 (Calibration by actual gas)
- For other gases, consultation is necessary regarding whether conversion conditions or calibration by actual gas is to be used.
* Optional: Scale indicating two types of fluids
- For other gases, consultation is necessary regarding whether conversion conditions or calibration by actual gas is to be used.
- Liquids: Standard fluid: Water
- For other liquids, consultation is necessary regarding whether conversion conditions or calibration by actual liquid is to be used.
- Gases: Air, N2, O2, H2, He, Ar, and CO2 (Calibration by actual gas)
- Flow range
- Gases: 0.5-5 ML/MIN to 3-30 L/MIN (See the Capacity Table below.)
* Optional: 0.5-3 ML/MIN - Liquids: 0.5-5 ML/MIN to 0.1-1 L/MIN (See the Capacity Table below.)
* Optional: 0.5-3 ML/MIN
- Gases: 0.5-5 ML/MIN to 3-30 L/MIN (See the Capacity Table below.)
- Accuracy
- Gases: FS±2% (Measurement point)
* Optional: FS±1% (Measurement point) - Liquids: FS±2% (Measurement point)
- Gases: FS±2% (Measurement point)
- Proof pressure
- Gases:
- 1.0 MPa for 100 ML/MIN or less
- 0.7 MPa for 5 L/MIN or less
- 0.5 MPa for 10 L/MIN or more
- Liquids:
- 1.0 MPa for 5 ML/MIN or less
- 0.7 MPa for 150 ML/MIN or less
- 0.5 MPa for 200 ML/MIN or more
- 5.Available scale : 10:1 * Optional: 20:1
- Gases:
- Materials: SS
- Body block: SUS316
- Tapered tube: Pyrex®, glass
- Packing: FKM, fluorocarbon resin
- Float: Pyrex, SUS 316, glass
- Protective cover: Acrylic resin
- Temperature resistance: MAX60℃
Other Article:
- Kobold Float-type Flow Meters/Switches
- Mecon Tubux M30 Universal Float-type Flow Meter
- Differential Pressure Flow Meter
- TE KPSI 710 Hydrostatic Level Transducer
- Kofloc 3660 Series Mass Flow Controller
