Kofloc DF-200C Digital Mass Flow Meter

Kofloc DF-200C Digital Mass Flow Meter is a high-performance digital mass flow controller with ±1%S.P. accuracy and ≤1-sec response. It also has a multiple-gas and multiple-range function of seven gases and the ease of changing the flow rate range of each gas.

Kofloc DF-200C Feature

  • High accuracy(±1%RD),Fast response(1 sec.max.in all range)
  • Multiple ranges and multiple gases supported
  • Communications functions installed as a standard feature(RS485)
  • RoHS/CE Standard compliant


Sensor type Thermal sensor
Valve type Normally closed proportional solenoid valve
Applicable gases*1 Multiple gases: N2 (Air, H2, He, Ar, O2, CO2)*2
Flow range*3 10/30/50/100/300/500 SCCM, 1/3/5/10 SLM*2
Control range 2 to 100% (F.S.)
Response*4 Total flow rate control range ±1 sec (within ±2% F.S.)
Accuracy*5 ±1.0% S.P. (> 35% F.S.)
±0.35% F.S. (≤ 35% F.S.)
Repeatability ±0.25% F.S.
Operating differential pressure*6 50 to 300 kPa (100 to 300 kPa for Ar and CO2)
Inlet maximum pressure 500kPa(G)
Proof pressure 980kPa(G)
External leak rate ≤1.0 x 10-8 Pa·m3/sec (He)
Temperature Working temp. 5 to 50℃
Accuracy guaranteed temp. 15 to 35℃
Allowable storage temp. -10 to 60℃
Allowable operating humidity 10 to 90% RH (without dew condensation)
Materials of a gas contact part SUS316, SUS316L, magnetic stainless steel, Ni, PTFE, PCTFE, and FKM
Electrical connection D-sub 9-pin, KFC standard (SEMI standard compliant), RJ-45 modular jacks (two)
Flow rate setting signal 0 to 5 V DC (input impedance: approx. 1 MΩ)
Flow rate output signal 0 to 5 V DC (load resistance 10 kΩ)
Digital communication Address setting with RS485 rotary switch: up to 99 devices (9600 bps)
Required power supply (DC) +15 V DC (±5%): 150 mA, -15 V DC (±5%): 150 mA
Joint*7 1/4 F900 (standard), 1/4 UJR, Rc 1/4
Mounting posture Horizontal installation recommended.
Weight*8 Approx. 850 g
  1. The gases must be dry and clean, free of corrosive components and foreign matter such as dust and mist.
  2. Dedicated software is available to change gases or change the actual full scale (F.S.) within the range of 30 to 100% (30 to 80% for CO2 only) of the specified full scale.
  3. The flow rate calibration units SCCM and SLM indicate a mass flow rate converted to a volume flow rate in cc/min and L/min at 0°C and 1 atm.
  4. Guarantee for calibration gas: N2.
  5. Accuracy for calibration gas: N2, flow range (max. full scale).
  6. The operating differential pressure may differ depending on specifications.
  7. Contact us for any other joints.
  8. Exclusive of the weight of joint

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