M–Series Mass Flow Meters simultaneously measure mass flow, volumetric flow, gas pressure, and gas temperature for 98+ gases from 0.01% to 100% of full scale.
Specifications of Alicat M–Series Mass Flow Meters
- Full-scale ranges: 0.5 SCCM to 5,000 SLPM for all gases (10,000 SLPM for H2)
- Measurement range: 0.01% – 100% of full scale
- Accuracy: ±0.6% of reading or ±0.1% of full scale, whichever is greater
- Optional high accuracy: ±0.5% of reading or ±0.1% of full scale, whichever is greater
- Repeatability: 0.1% of reading and 0.02% of full scale
- Response time: <10 ms
- Operating temperature: –10°C to +60°C
- Full-scale operating pressure: 160 PSIA (11 barA)
Features of Alicat M-Series Mass Flow Meters
- Simultaneously measure volumetric flow, mass flow, gas pressure, and gas temperature.
- Field-adjustable engineering units and STP/NTP conditions.
- Select process gas from 98+ preloaded NIST-traceable gas calibrations.
- Define and store 20 custom gas mixtures of up to 5 constituent gases.
- Read measurements from the backlit display and control configuration using the integrated touchpad.
- Optional integrated dual-flow totalizers and alarms.
Device Range
- Communication: Analog, RS–232, RS–485, Modbus RTU, Modbus TCP/IP, DeviceNet, EtherCAT, EtherNet/IP, PROFIBUS, PROFINET
- Process connections: NPT, SAE, AN, BSPP/G, compression, VCR, VCO
- Displays: Backlit monochrome or color; integrated or panel–mount; none
- Elastomers: FKM, FFKM, EPDM, Silicone
- Calibration: Standard or high-accuracy; custom calibration points
Source: www.alicat.com
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