Alicat MQ–Series High-Pressure Mass Flow Meters measure mass and volumetric flow rates at operating pressures up to 320 PSIA (22 barA).
Specifications of Alicat MQ–Series High Pressure Mass Flow Meters
- Full-scale ranges: 10 SCCM to 5,000 SLPM for all gases (10,000 SLPM for H2)
- Measurement range: 0.1% – 100% of full scale
- Accuracy: ±0.6% of reading or ±0.1% of full scale, whichever is greater
- Repeatability: ±0.1% of full scale
- Response time: <10 ms
- Operating temperature: –10°C to +60°C
- Full-scale operating pressure: 320 PSIA (22 barA)
Features of Alicat MQ–Series High-Pressure Mass Flow Meters
- Simultaneously measure volumetric flow, mass flow, gas pressure, and gas temperature.
- Field-adjustable engineering units and STP/NTP conditions.
- Select process gas from 98+ preloaded NIST-traceable gas calibrations.
- Define and store 20 custom gas mixtures of up to 5 constituent gases.
- Read measurements from the backlit display and control configuration using the integrated touchpad.
- Optional integrated dual flow totalizers and alarms.
Build and performance options
- Communication: Analog, RS–232, RS–485, Modbus RTU, Modbus TCP/IP, DeviceNet, EtherCAT, EtherNet/IP, PROFIBUS, PROFINET
- Process connections: NPT, SAE, AN, BSPP/G, compression, VCR, VCO
- Displays: Backlit monochrome or color; integrated or panel–mount; none
- Elastomers: FKM, FFKM, EPDM, Silicone
- Calibration: Custom calibration points
Source : www.alicat.com
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