Feature
- Clamp on type
- Wide measurement range ability
- Low power consumption
- Compact degisn
Precise liquid flow monitoring by ultrasonic for semiconductor fabrication processes
Specification
Convertor
- Model: SLF-100
- Measurement method: Ultrasonic transit time method
- Environment conditions: Temperature:-10〜50°C
- Display function: LCD display(16characters× 2lines)Instantaneous flow rate, or Integrated flow rate
- Configuration menu: Measurement range, Measurement unit, etc.
- Accuracy:
- ±2%RD(flow speed 1〜10m/s)
- ±2cm/s(flow speed less than 1m/s)
- Outoput:
- Analog(DC 4〜20mA, load resistance: less than 450Ω)
- Pulse(Open collector stanndard 30V, 0.25A)
- Alarm(Open collector stanndard 30V, 0.25A)Power supply DC12〜30V
- Power consumption: less than 2.5VA
- Weight: Appox. 330g
Sensor
- Model: SLT-12, SLT-14, STL-15
- Structure: Clamp-on type
- Material: PVC, PTFE
- Applicable liquids: de-ionized water, chemical solution
- Applicable pipes:
- Nominal diameter
- SLT-12:
- 3/4 inch(I.D.15.88 O.D.19.05),
- 1/2inch (I.D.9.53 O.D.12.70),
- 3/8inch (I.D.6.35 O.D.9.53)
- SLT-14:
- 3/4inch (I.D.15.88 O.D.19.05),
- 1/2inch (I.D.9.53 O.D.12.70)
- SLT-15:
- 1inch (I.D.22.23 O.D.25.4),
- 3/4inch (I.D.15.88 O.D.19.05)
- Material: PFA
- Environment conditions of flow: Temperature: 10〜60°C (SLT-12), 10〜70°C (SLT-14), 10〜50°C (SLT-15)
- Cable: 5m(max 10m)
- Measurement range: 0.5〜230L/min(1 inch), 0.2〜120 L/min(3/4 inch), 0.1〜40 L/min(1/2 inch), 0.1〜20 L/min(3/8 inch)
- Weight: STL-12 Approx. 450g STL-14 Approx. 350g STL-15 Approx. 360g
Reference: SLF-100 small ultrasonic flow meter
Baca Juga
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