- CUBEGM-X Seires is an all-in-one unit which have Touch panel, PLC unit, Mass Flow Controller, Power supply, Valve, Check Valve and Gas Mixer.
- Program operation: Program operation is possible by setting the flow rate and time of each line.
- Alarm function: Alarm sound is notified if an error occurs by any upper / lower limit setting of each line flow rate.
- Simply connect the piping to the IN side and OUT side.
- CUBEGM-X Series is a device which supplies a mixed gas species of 2, 3, 4 to set up and control to any of the flow rate.
- Analog mass flow controller [1000 Series] is mounted as a standard feature.
- Mass flow controller, which flow control range is from 10SCCM to 50SLM, can be mounted as a standard. In other cases, please contact us.
- Can be reduced the cost when you use a Gas mixer than you purchase gas cylinders that has been prepared in the mixing ratio.
- It can be used for a wide range of applications such as analysis, environment, bio, packaging, medical, gas welding.
- Applicable gases : Inert gas. (For more information, please contact us)
|Size||CUBEGM-X2 : W350×D400×H280(mm) ※Except protrusion|
|CUBEGM-X3 : W430×D400×H280(mm) ※Except protrusion|
|CUBEGM-X4 : W510×D400×H280(mm) ※Except protrusion|
|Built-in MFC||C1000series／Ｃ2000series(manufactured by FCON)or FCST1000series（manufactured by Fujikin）|
|Current consumption||MAX 2.3A ※In the case of 4 mass flow controllers equipped with|
|Flow range*||1 LINE : F.S.10SCCM～20SLM (However, the mixed gas flow rate must be less than 50 SLM)|
|Flow rate control||MFC : C1000 Series or FCST1000L Series|
|Flow rate output signals||0-5VDC|
|Flow rate control range||1 LINE : F.S.10SCCM～20SLM (However, the mixed gas flow rate must be less than 50 SLM)|
|Operating differential pressure||Conform to built-in mass flow controller specification|
|Pressure Resistance||Conform to built-in mass flow controller specification|
|Operating environment||5～50°C（Accuracy guaranteed between 15～35°C），85％RH（No condensation permitted）|
|Leak Integrity||≦5×10-7Pa･m3/sec (He)|
|Wetted surface material||SUS316, PTFE, Fluoro-Rubber|
|(FCST1000L Series : Magnetic stainless steel, Fluoro-Rubber or Chloroprene rubber)|
|Standard Fitting||1/4in.SWL (equivalent) ※For other fitting, please contact us.|
|Inlet and Outlet valves||Solenoid Valve|
|Mass flow control||Touch panel operation|
|Accessory||AC cable(2m), User’s manual, Written guarantee|
*At FCON, flow rates (SCCM, SLM)are converted to values at 0°C, 101.3kPa abs(1atm)for calibration
May be changed items depend on the number of mass flow controller. The other specifications, please contact us.
Data Sheet : Fcon CUBEGMX Touch Panel Gas Mixer