Description
Kofloc EX-250S Series Digital Mass Flow Meter device which is adopted the own developed both stable high-speed thermal sensors and small proportional solenoid valves and is realized high accuracy and quick response with RS 485 communication in spite of compact.
Kofloc EX-250S Feature
- Lower cost but high accuracy measurement
- High-speed response and zero stability
- 0-5VDC or 4-20mA Input/output signal and +/-15VDC or 24VDC power supply
- Mediocrity D-sub 9pin
- Gases registered in EX-250S are usable by rotary-switch
*Calculate the flow rate with conversion factor based onN2 gas - RoHS compliance, CE marked
Specification
| Model | Mass Flow Controller | Mass Flow Meter | |
| EX-250SC | EX-250SM | ||
| Sensor type | Thermal sensor | ||
| Valve type | Normally closed proportional solenoid valve | – | |
| Applicable gases?*1? | N2?Air?H2?He?Ar?O2?CO2 etc. | ||
| (Gases not specifically mentioned here are subject to calibration for N2 equivalent.) | |||
| Flow range?*2? | 10SCCM ? 5SLM | ||
| Control?measure?range | 2 ? 100%(F.S.) | ||
| Response | ? 1sec ?within ± 2%F.S.??*8? | ||
| Accuracy?*3? | ± 1.0%F.S. | ||
| Repeatability | ± 0.2%F.S. | ||
| Operating differential pressure?*4? | 50 ? 300kPa?Ar?CO2??00kPa ? 300kPa? | – | |
| Inlet maximum pressure | 500kPa?G? | ||
| Proof pressure | 980kPa?G? | ||
| External leak rate?He? | ? 1.0 × 10-8Pa?m3/sec | ||
| Temperature | Working temp. | 5 ? 50? | |
| Accuracy guaranteed temp. | 15 ? 35? | ||
| Allowable storage temp. | -10 ? 60? | ||
| Allowable operating humidity | 10 ? 90%RH (without dew condensation) | ||
| Materials of a gas contact part | SUS316, SUS316L, magnetic stainless steel?*5?, PTFE, FKM | ||
| Electrical connection | Dsub 9pin KFC Standard?SEMI standard is compliant? | ||
| HR-10A | |||
| Flow rate setting signal | 0?5VDC(input impedance: approx. 1M ?) | – | |
| or 4?20mA(input impedance: approx. 250 ?) | |||
| Flow rate output signal | 0 ? 5VDC( load resistance ?10k ?) | ||
| or 4 ? 20mA( load resistance ?500 ?) | |||
| Digital communication | RS485?rotary-switch address setting | ||
| Required power supply (DC) | +15VDC( ± 5%)100mA , -15VDC?± 5%?150mA | ||
| or +24VDC?± 10%? ?180mA? (MFM would be ?100mA) | |||
| Joint?*6? | 1/4F900?standard? | ||
| Mounting posture | Horizontal installation recommended. | ||
| Weight?*7? | Approx.500g | Approx.440g | |
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- Kofloc EX-550 Metal Digital Mass Flow Meter
