Brooks offers the industry’s most advanced suite of FOUP carrier/reticle pod cleaners and photomask/reticle stockers. Using state-of-the-art humidity control along with in-situ metrology, our products address all critical airborne molecular contamination, productivity, and process stability challenges at sub20-nm nodes.
The Brooks M2 Reticle Changer is a reticle/mask exchange and inspection system. Individual I/O stations allow transfer of the reticle/mask between all scanner/stepper and shipping boxes, such as Canon, Nikon, ASML, Toppan, Hoya, DMS box etc.).
PuroMaxx 2 allows transfer of the reticle/mask between all scanner/stepper and shipping boxes.
- Fully automated reticle/mask handling
- Class 1 mini-environment/ESD/AMC
- Reticle orientation
- Reticle code identification
- RF-tag or barcode identification of boxes
- Bright light visual inspection
- Embedded metrology tool
- N2 blow off
For more further information please contact : email@example.com
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