Description
Kofloc EX-250S Series Digital Mass Flow Meter device which is adopted the own developed both stable high-speed thermal sensors and small proportional solenoid valves and is realized high accuracy and quick response with RS 485 communication in spite of compact.
Kofloc EX-250S Feature
- Lower cost but high accuracy measurement
- High-speed response and zero stability
- 0-5VDC or 4-20mA Input/output signal and +/-15VDC or 24VDC power supply
- Mediocrity D-sub 9pin
- Gases registered in EX-250S are usable by rotary-switch
*Calculate the flow rate with conversion factor based onN2 gas - RoHS compliance, CE marked
Specification
| Model | Mass Flow Controller | Mass Flow Meter | |
| EX-250SC | EX-250SM | ||
| Sensor type | Thermal sensor | ||
| Valve type | Normally closed proportional solenoid valve | – | |
| Applicable gases 1 | N2 Air H2 He Ar O2 CO2 etc. | ||
| (Gases not specifically mentioned here are subject to calibration for N2 equivalent.) | |||
| Flow range 2 | 10SCCM 5SLM | ||
| Control measure range | 2 100%(F.S.) | ||
| Response | 1sec within ± 2%F.S.8 | ||
| Accuracy 3 | ± 1.0%F.S. | ||
| Repeatability | ± 0.2%F.S. | ||
| Operating differential pressure 4 | 50 300k Pa Ar CO2 00k Pa 300k Pa | – | |
| Inlet maximum pressure | 500kPa G | ||
| Proof pressure | 980kPa G | ||
| External leak rate He | 1.0 × 10-8Pa m3/sec | ||
| Temperature | Working temp. | 5 50 | |
| Accuracy guaranteed temp. | 15 35 | ||
| Allowable storage temp. | -10 60 | ||
| Allowable operating humidity | 10 90%RH (without dew condensation) | ||
| Materials of a gas contact part | SUS316, SUS316L, magnetic stainless steel 5, PTFE, FKM | ||
| Electrical connection | Dsub 9pin KFC Standard SEMI standard is compliant | ||
| HR-10A | |||
| Flow rate setting signal | 05VDC (input impedance: approx. 1M) | – | |
| or 420mA (input impedance: approx. 250) | |||
| Flow rate output signal | 0 5VDC (load resistance 10k) | ||
| or 4 20mA (load resistance 500) | |||
| Digital communication | RS485 rotary-switch address setting | ||
| Required power supply (DC) | +15VDC (± 5%) 100mA, -15VDC ± 5% 150mA | ||
| or +24VDC ± 10% 180mA (MFM would be 100mA) | |||
| Joint 6 | 1/4F900 standard | ||
| Mounting posture | Horizontal installation recommended. | ||
| Weight 7 | Approx.500g | Approx.440g | |
Other Article:
- TDS100P Portable Ultrasonic Flow Meter
- Sonic SGF-200 Ultrasonic Inline Gas Flow Meter
- Differential Pressure Flow Meter
- MDM4901Fl, Microsensorcorp-Piezoresistive Differential Pressure Flow Meter
- Kofloc EX-550 Metal Digital Mass Flow Meter
