Alicat MS–Series Anti-Corrosive Mass Flow Meters

MS-Series Anti-Corrosive Mass Flow Meters measure mass and volumetric flow rates for 130+ gases, including 32 corrosive gases.

Specifications of Alicat MS–Series Anti-Corrosive Mass Flow Meters

Devices are custom ranged from 0.5 SCCM full scale to 5,000 SLPM full scale for all gases (10,000 SLPM for H2).

Standard specs

• Full-scale ranges: 0.5 SCCM to 5,000 SLPM for all gases (10,000 SLPM for H2)
• Measurement range: 1% – 100% of full scale
• Accuracy: 0.8% of reading and 0.2% of full scale
• Optional high-accuracy: 0.4% of reading and 0.2% of full scale
• Repeatability: ±0.2% of full scale
• Response time: <10 ms
• Operating temperature: –10°C to +60°C
• Full-scale operating pressure: 160 PSIA (11 barA)

Features of Alicat MS–Series Anti-Corrosive Mass Flow Meters

• Simultaneously measure volumetric flow, mass flow, gas pressure, and gas temperature.
• Field-adjustable engineering units and STP/NTP conditions.
• Select process gas from 98+ preloaded NIST-traceable gas calibrations.
• Define and store 20 custom gas mixtures of up to 5 constituent gases.
• Read measurements from the backlit display and control configuration using the integrated touchpad.
• Optional integrated dual-flow totalizers and alarms.

Build and Performance

• Communication: Analog, RS–232, RS–485, Modbus RTU, Modbus TCP/IP, DeviceNet, EtherCAT, EtherNet/IP, PROFIBUS, PROFINET
• Process connections: NPT, SAE, AN, BSPP/G, compression, VCR, VCO
• Displays: Backlit monochrome or color; integrated or panel–mount; none
• Wetted materials: 316L stainless steel and FFKM; FKM or EPDM as needed
• Calibration: Standard or high-accuracy; custom calibration points

Source: www.alicat.com

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