Kofloc 6610 Series Pressure Regulator Valve Precision Regulator has been developed for better repeatability and quick, reliable pressure regulation by increasing the accuracy of the low-pressure side compared with the Model 6600. It is ideal for high-sensitivity analyzers and semiconductor manufacturing equipment, as well as for research and development.
Kofloc 6610 Series Features
- High-precision regulation on the low-pressure side, High regulation performance with repeatability of ±1% or less when the pressure on the primary side and load resistance on the secondary side change under the set pressure condition of 0.01–0.15 MPa.
- Non-grease specification, The sections in contact with gas are made of stainless steel, Viton, and Teflon without using grease. This valve is ideal for the semiconductor industry which requires ultra-clean conditions.
- Locknut, The regulating position, once it has been set, can be fixed by a lock nut to prevent the setting from changing.
- Non-bleed type, This non-bleed type valve prevents gas from leaking to the outside
Application
- Gas chromatography
- High-purity gas control
- Low-pressure controllers
- Semiconductor industry
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Standard Specifications
| Fluids | Various gases |
| Maximum primary pressure | 0.4MPa |
| Secondary control pressure | 0.01-0.15MPa |
| Maximum flow | 5L/MIN |
| Minimum operating differential | 0.1 MPa or more |
| Materials of parts in contact with gases | SUS316, FKM, fluorocarbon resin, SUS304, SUS303 |
| Proof pressure | 0.8MPa |
| Repeatability | Within ±1% of the pressure rating |
| Heat resistance | 5°C-60°C |
| Connection end | Rc1/8 |
| Materials of parts in contact with fluids | SUS316, FKM, fluorocarbon resin, SUS304, SUS303 |
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