Kofloc 6610 Series Precision Pressure Regulator Valve

Kofloc 6610 Series Pressure Regulator Valve Precision Regulator has been developed for better repeatability and quick, reliable pressure regulation by increasing the accuracy of the low-pressure side compared with the Model 6600. It is ideal for high-sensitivity analyzers and semiconductor manufacturing equipment, as well as for research and development.

Kofloc 6610 Series Features

  • High-precision regulation on the low-pressure side, High regulation performance with repeatability of ±1% or less when the pressure on the primary side and load resistance on the secondary side change under the set pressure condition of 0.01–0.15 MPa.
  • Non-grease specification, The sections in contact with gas are made of stainless steel, Viton, and Teflon without using grease. This valve is ideal for the semiconductor industry which requires ultra-clean conditions.
  • Locknut, The regulating position, once it has been set, can be fixed by a lock nut to prevent the setting from changing.
  • Non-bleed type, This non-bleed type valve prevents gas from leaking to the outside


  • Gas chromatography
  • High-purity gas control
  • Low-pressure controllers
  • Semiconductor industry

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Standard Specifications

Fluids Various gases
Maximum primary pressure 0.4MPa
Secondary control pressure 0.01-0.15MPa
Maximum flow 5L/MIN
Minimum operating differential 0.1 MPa or more
Materials of parts in contact with gases SUS316, FKM, fluorocarbon resin, SUS304, SUS303
Proof pressure 0.8MPa
Repeatability Within ±1% of the pressure rating
Heat resistance 5°C-60°C
Connection end Rc1/8
Materials of parts in contact with fluids SUS316, FKM, fluorocarbon resin, SUS304, SUS303