Kofloc Model 3760 Mass Flow Meter

The Model 3760 Series is a compact, low-cost mass flow meter developed based on the Model 3660 Series. It has been developed as a standard model of various analyzers and vacuum equipment for research and development at universities and research institutes.

Features :

• Improved constant-current temperature difference detection type flow sensor for a quick response
• The compact body permits installation at any location.

Standard Specifications:

1. Flow range (N2 equivalent, 20?/1atm)

• 3760: 10 SCCM–20 SLM (freely selectable)
• 3765: 30 SLM–100 SLM (freely selectable)

2. Sensor: Thermal mass flow sensor

3. Response

• 3760: 2 sec. or less
• 3765 : 3 sec. or less

4. Accuracy

• 3760: ±1.0%F.S. (25?)
• 3765: ±1.5%F.S. (25?)

5. Temperature coefficient

• 3760: ±0.1 F.S./? (15–35?)
• 3765: ±0.2 F.S./? (15–35?)

6. Repeatability: ±0.5%F.S. (20?)

7. Proof pressure: 980kPa (G)

8. Leak rate: 1 × 10-8 Pa•m3/s or less (excluding permeation of He)

9. Allowable ambient temperature: 5–45?

10. Allowable ambient humidity: 10–90% (No condensation allowed)

11. Materials of parts in  contact with gases :  Body: SUS316

Sealing: FKM (option: CR or NBR)

12. Electric connection: Dsub 9-pin connector as per KFC  Standard (Compliant with SEMI Standard)

13. Flow rate output signals : 0–5 VDC (External load resistance: 250 k? or more)

14. Required power supply : +15VDC (±5%) 100mA, ?15VDC (±5%)100mA

15. Joint (Main unit bore)

3760 : Standard: 1/4SWL

Option: 1/8SWL 1/4VCR RC1/4, etc.

3765 : Standard: 3/8SWL

Option: 1/2SWL 3/8VCR RC3/8, etc.

16. Weight

• 3760: Approx. 800 g
• 3765: Approx. 1000 g

Note :