General
Kofloc DF-550C Series All-Metal Digital Mass Flow Controller is now released as an all-metal model of the high-performance digital mass flow controller DF-250C Series. The metal sealed structure enables controlling the measurement of corrosive gases such as semiconductor process gases.
Features
- Response improved to 1 sec or faster in all flow rate?ranges thanks to a new solenoid
- The stainless steel seal supports high-reactive gases.
- Lineup ranging from 10 SCCM to 10 SLM
- Two communication ports enabling daisy-chaining
- RS-485 communication function installed as standard
- RoHS CE standard compliant
Kofloc DF-550C Series Specification
| Sensor type | Thermal sensor | |
| Valve type | Normally closed proportional solenoid valve | |
| Applicable gases*1 | N2, Air, H2, He, Ar, O2, CO2, etc. Gases not specifically mentioned here are subject to calibration for N2 equivalent.) | |
| Flow range*2 | 10 SCCM to 10 SLM | |
| Control range | 2 to 100% (F.S.) | |
| Response*3 | Total flow rate control range ? 1 sec (within ±2% F.S.) | |
| Accuracy*4 | ±1.0%F.S. | |
| Repeatability | ±0.25%F.S. | |
| Operating differential pressure*5 | 50 to 350 kPa (100 to 350 kPa for F.S. 10 SLM) | |
| Inlet maximum pressure | 500kPa?G? | |
| Proof pressure | 980kPa?G? | |
| External leak rate | ? 1.0 x 10-11 Pa·m3/sec (He) | |
| Temperature | Working temp. | 5 to 50? |
| Accuracy guaranteed temp. | 15 to 35? | |
| Allowable storage temp. | -10 to 60? | |
| Allowable operating humidity | 10 to 90% RH (without dew condensation) | |
| Materials of gas contact part | SUS316L, PTFE, and magnetic stainless steel | |
| Electrical connection | D-sub 9-pin, KFC standard (SEMI standard compliant), RJ-45 modular jacks (two) | |
| Flow rate setting signal | 0 to 5 V DC (input impedance approx. 1 M?) | |
| Flow rate output signal | 0 to 5 V DC (load resistance 10 K?) | |
| Digital communication | Address setting with RS485 rotary switch: up to 99 devices (9600 bps) | |
| Required power supply (DC) | +15 V DC (±5%), 150 mA; -15 V DC (±5%), 150 mA | |
| Joint | 1/4 VCR or equivalent | |
| Mounting posture | Horizontal installation recommended. | |
| Weight | Approx. 1100 g | |
- The gases must be dry and clean, free of corrosive components and foreign matter such as dust and mist.
- The flow rate units SCCM and SLM indicate a mass flow rate converted to a volume flow rate in cc/min and L/min at 0°C and 1 atm
- Guarantee for calibration gas: N2.
- Accuracy for calibration gas: N2, flow range (max. full scale).
- The operating differential pressure may differ depending on specifications.
Other Articles:
- Kofloc DF-250C Series Digital Mass Flow Meter
- Kytola Seal Water Flow Meter Model SLM
- Kofloc DF-350C Digital Mass Flow Meter
- Kofloc Model 3760 Series
- Kofloc Back Pressure Valve Model 6801 Series
- Kofloc Mass Flow Controller D8500 Series
- Adapter Connector NCS-163-ADF-CH Nanaboshi
- Kofloc Model 3760 Series
- Kofloc Back Pressure Valve Model 6801 Series
- Differential Pressure Flow Meter
- Kofloc Mass Flow Meter and Controllers
- Rotameter Kofloc RK1930/RK1935
- Kofloc CK Series Flow Setting Device Model
- Kofloc 2600 All-Teflon Constant Flow Control Valve
- Kofloc 3660 Series Mass Flow Controller
- Kofloc Model DPM-3 Flow Indicators
- Kofloc FM31 Series Small Karman Vortex Flowmeter
- Kofloc 8500 Series Mass Flow Meter
