Feature
- CUBEGM-X Seires is an all-in-one unit which have Touch panel, PLC unit, Mass Flow Controller, Power supply, Valve, Check Valve and Gas Mixer.
- Program operation: Program operation is possible by setting the flow rate and time of each line.
- Alarm function: Alarm sound is notified if an error occurs by any upper / lower limit setting of each line flow rate.
- Simply connect the piping to the IN side and OUT side.
- CUBEGM-X Series is a device which supplies a mixed gas species of 2, 3, 4 to set up and control to any of the flow rate.
- Analog mass flow controller [1000 Series] is mounted as a standard feature.
- Mass flow controller, which flow control range is from 10SCCM to 50SLM, can be mounted as a standard. In other cases, please contact us.
- Can be reduced the cost when you use a Gas mixer than you purchase gas cylinders that has been prepared in the mixing ratio.
- It can be used for a wide range of applications such as analysis, environment, bio, packaging, medical, gas welding.
- Applicable gases : Inert gas. (For more information, please contact us)
Specification
Size | CUBEGM-X2 : W350×D400×H280(mm)??Except protrusion |
CUBEGM-X3 : W430×D400×H280(mm)??Except protrusion | |
CUBEGM-X4 : W510×D400×H280(mm)??Except protrusion | |
Built-in MFC | C1000series??2000series(manufactured by FCON)or FCST1000series?manufactured by Fujikin? |
Current consumption | MAX 2.3A ?In the case of 4 mass flow controllers equipped with |
Flow range* | 1 LINE : F.S.10SCCM?20SLM (However, the mixed gas flow rate must be less than 50 SLM) |
Flow rate control | MFC : C1000 Series or FCST1000L Series |
Flow rate output signals | 0-5VDC |
Flow rate control range | 1 LINE : F.S.10SCCM?20SLM (However, the mixed gas flow rate must be less than 50 SLM) |
Operating differential pressure | Conform to built-in mass flow controller specification |
Pressure Resistance | Conform to built-in mass flow controller specification |
Operating environment | 5?50°C?Accuracy guaranteed between 15?35°C??85?RH?No condensation permitted? |
Leak Integrity | ?5×10-7Pa?m3/sec (He) |
Wetted surface material | SUS316, PTFE, Fluoro-Rubber |
(FCST1000L Series : Magnetic stainless steel, Fluoro-Rubber or Chloroprene rubber) | |
Standard Fitting | 1/4in.SWL (equivalent) ?For other fitting, please contact us. |
Inlet and Outlet valves | Solenoid Valve |
Mass flow control | Touch panel operation |
Input power | AC100-240V |
Accessory | AC cable(2m), User’s manual, Written guarantee |
*At FCON, flow rates (SCCM, SLM)are converted to values at 0°C, 101.3kPa abs(1atm)for calibration
May be changed items depend on the number of mass flow controller. The other specifications, please contact us.
Data Sheet : Fcon CUBEGMX Touch Panel Gas Mixer
Reference:http://www.fcon-inc.jp/