Description Brooks reticle handling and management products benefit fabs by improving the effectiveness of their reticle inventories. Brooks reticle solutions also benefit mask shops that produce and ship reticles. With industry shifts to sub 32nm linewidths and from 200mm to 300mm wafer diameters, reticles have become increasingly more expensive to produce, and the impact of […]
Description Brooks offers the industry’s most advanced suite of FOUP carrier/reticle pod cleaners and photomask/reticle stockers. Using state-of-the-art humidity control along with in-situ metrology, our products address all critical airborne molecular contamination, productivity, and process stability challenges at sub20-nm nodes. The Brooks M2 Reticle Changer is a reticle/mask exchange and inspection system. Individual I/O stations […]