General Information
Kofloc D8500 Series Mass Flow Meter/meter driven by a 24 VDC power supply has been developed as a successor to the MODEL8300. The viewpoint change function of the display unit and the pattern setting function are unique to this model, and noise resistance has been improved dramatically. A sister model with a detachable display and setting unit is also available.
Kofloc D8500 Series Features
- The high-lift actuator allows this compact model to control a large flow rate.
- Equipped with a display and setting unit, this model can be operated by a 24 VDC power supply.
- The RS232C/RS485 communication function and integration function are provided as standard equipment.
- The 14-bit converter permits to display and operation in 4-1/2 digits.
- Control of the flow rate of inflammable gas is possible because the heat generating part of the sensor is not exposed to the gas.
- There are no limitations to the mounting position that may be employed.
- In addition to the SV setting, five other patterns can be set.
- Auto zero and auto close functions are also standard.
Specification
| Sensor type | Thermal sensor | |
| Valve type | Normally closed solenoid valve | |
| Applicable gases*1 | N2, Air, H2, He, Ar, O2, CO2, etc. Gases not specifically mentioned here are subject to calibration for N2 equivalent.) | |
| Flow range*2 | 50 SCCM to 5 SLM and Over 5 SLM-20 SLM | |
| Control range | 2 to 100% (F.S.) | |
| Response*3 | 0–100% F.S. or more within 2 sec. *1 0–below 10% F.S. within 4 sec. *1 | |
| Accuracy*4 | ±1.0%F.S. *2 (50 SCCM to 5 SLM) and ±1.5%F.S. *2(Over 5 SLM-20 SLM) | |
| Repeatability | ±0.75%F.S. | |
| Operating differential pressure*5 | 50–300 kPa (G) (50 SCCM to 5 SLM) and 100–300 kPa (G)(Over 5 SLM-20 SLM) | |
| Inlet maximum pressure | 500kPa?G?or less | |
| Proof pressure | 1000kPa?G? | |
| External leak rate | 1.0 x 10-8 Pa·m3/sec or less *3 | |
| Temperature | Working temp. | 5 to 45? |
| Allowable operating humidity | 10 to 90% RH (without dew condensation) | |
| Materials of the gas contact part | SUS316L, PTFE, and magnetic stainless steel | |
| Electrical connection | D-sub 9-pin, KFC standard (SEMI standard compliant), RJ-45 modular jacks (two) | |
| Flow rate setting signal | 0 to 5 V DC (input impedance approx. 1 M?) | |
| Flow rate output signal | 0 to 5 V DC (load resistance 10 K?) | |
| Digital communication | Address setting with RS485 rotary switch: up to 99 devices (9600 bps) | |
| Required power supply (DC) | +15 V DC (±5%), 150 mA; -15 V DC (±5%), 150 mA | |
| Joint | 1/4 SWL, RC1/4, 1/4 VCR | |
| Mounting posture | Not specified | |
| Weight | Approx. 1000 g | |
- The time required to reach the control flow ±2% F.S. from the fully closed state
- With the standard pressure of 200 kPa (G) and the standard temperature of 20?
- Permeation is not included. The leakage by prolonged permeation shall not exceed 1 × 106 Pa?m3/sec.
- The units of measurement vary with the full-scale flow. E.g.: With 1 SLM, the flows can be added up to 9999 9999 9.999 L.
- For other joints, please contact us.
- The weight may slightly vary depending on the joint. (*7) These apply to the D8500MC mass flow controller.
Datasheet: KOFLOC General Catalog D8500
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