General
Fcon 1000 Series Analog Mass Flow Controller is an analog model specializing the basic functions of the mass flow controller, Improved performance and reliability by basic functions pursuing original technology, Two type of Control Power Supply, Floor-standing “PA01” and Panel Mount “PA01P” and Compact size.
Fcon 1000 Series Feature
- The suppression of Flow surge (overshoot) at the start (Requires more than 30 seconds of interval).
- Input & Output Signal ? Analog (0?5VDC)
- To control the mass flow controller, a control power supply and a signal cable are required.
Specification
Mass Flow Controller | C1005 | C1020 | C1030/C1050 | C1100 |
Mass Flow Meter | M1005 | M1020 | M1030/M1050 | – |
Flow range (N2equivalent) | 10,20,30,50,100,200,300,500SCCM | 10,20SLM | 30,50SLM | 100LM |
1,2,3,5SLM | ||||
Gases | Various Gases (Please consult about corrosive gas) | Air, N2, Ar, H2, CO2, O2, He | Air, N2 | |
Valve type | NC : Normally Close (Excluding Mass Flow Meter) | |||
Flow rate control range | 5-100? F.S (Excluding Mass Flow Meter) | |||
Accuracy | ±2? F.S (Accuracy guaranteed between 15-35?) | |||
Setting signal | 0.25-5VDC (excluding Mass Flow Meter) | |||
Output signal | 0-5VDC | |||
Repeatability | ±0.2? F.S | ±0.5? F.S | ||
Response | ?6sec | ?15sec | ||
Operating differential pressure | 50-300KPa | 200-300KPa | ||
Pressure resistance | 1MPa(G) | |||
Operating temperature | 5-50?, ?85?RH (Scope of accuracy guarantee : 15-35?) | |||
Leak integrity | 1×10-7Pa?m3/sec He | |||
Mounting attitude | Free | |||
Drive power source | +15VDC?60mA?-15VDC?150mA | |||
Communication | Analog : 0-5VDC | |||
Wetted surface material | SUS316, PTFE, Fluoro-Rubber | |||
Seal material | Fluoro-Rubber | |||
Actuator system | Thermal (excluding Mass Flow Meter) | |||
Surface treatment | Machined finish | |||
Standard fitting | 1/4in.SWL (equivalent), One-touch ?ttings, ?? For other fitting, please contact us. |
Fcon 1000 Series Dimension
Order Code
Reference : www.fcon-inc.jp
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