Feature CUBEGM-X? Series (Buffer tank specification) is an all-in-one unit that has a Touch panel, PLC unit, Mass Flow Controller, Power supply, Valve, Check Valve Gas Mixer and Buffer tank. Program operation: Program operation is possible by setting the flow rate and time of each line. Alarm function: Alarm sound is notified if an error […]
Feature CUBEGM-X Seires is an all-in-one unit which have Touch panel, PLC unit, Mass Flow Controller, Power supply, Valve, Check Valve and Gas Mixer. Program operation: Program operation is possible by setting the flow rate and time of each line. Alarm function: Alarm sound is notified if an error occurs by any upper / lower […]
Feature [CUBEGM Seires] is an all-in-one unit that has a mass flow controller, control power supply, valve, check valve and gas mixer. Simply connect the piping to the INside and OUTside. [CUBEGM Series] is a device that supplies a mixed gas species of 2, 3, 4 to set up and control to any of the […]
Control power supply PA01 Series and a signal cable are required to control the mass flow controller 1000 Series. PA01 Series has two types of Control Power Supply, Floor-standing “PA01S” and Panel Mount “PA01PS” with compact size. Feature Improved performance and reliability by basic functions pursuing original technology. The suppression of Flow surge (overshoot) at […]
General Fcon 1000 Series Analog Mass Flow Controller is an analog model specializing the basic functions of the mass flow controller, Improved performance and reliability by basic functions pursuing original technology, Two type of Control Power Supply, Floor-standing “PA01” and Panel Mount “PA01P” and Compact size. Fcon 1000 Series Feature The suppression of Flow surge […]





