Feature CUBEGM-X? Series (Buffer tank specification) is an all-in-one unit that has a Touch panel, PLC unit, Mass Flow Controller, Power supply, Valve, Check Valve Gas Mixer and Buffer tank. Program operation: Program operation is possible by setting the flow rate and time of each line. Alarm function: Alarm sound is notified if an error […]
Feature CUBEGM-X Seires is an all-in-one unit which have Touch panel, PLC unit, Mass Flow Controller, Power supply, Valve, Check Valve and Gas Mixer. Program operation: Program operation is possible by setting the flow rate and time of each line. Alarm function: Alarm sound is notified if an error occurs by any upper / lower […]
Feature [CUBEGM Seires] is an all-in-one unit that has a mass flow controller, control power supply, valve, check valve and gas mixer. Simply connect the piping to the INside and OUTside. [CUBEGM Series] is a device that supplies a mixed gas species of 2, 3, 4 to set up and control to any of the […]