Low-Cost Metal Sealed Mass Flow Controller
The Model 5400 Series is a successor to the Model 3440, with enhanced basic capabilities. The appearance is similar to conventional MFC. The sensor drive system is improved: the zero-drift is further reduced and the response in the lower range is improved.
The Model 5410 Series is a mass flow meter with the same body design as that of the 5400 series.
Features :
- Control and response in each setting range are improved.
- The following capability to the set voltage is improved (supporting ramping specifications).
- As the valve is improved, the control resolution in each range is improved.
Standard Specifications
1. Flow range (N2 equivalent,20?/1 atm)
- 5400: 10 SCCM–20 SLM (freely selectable)
- 5410: 10 SCCM–20SLM(freely selectable)
2. Sensor
- 5400: Thermal mass flow sensor
3. Valve type
- 5400: Proportional solenoid valve (closed when not energized) 5410 : –
4. Control range
- 5400: 2–100% (F.S.) 5410 : –
5. Response
- 5400: 1 sec. or less (0–100% within ±2% typical) 5410 : –
6. Accuracy
- 5400: ±1% F.S. (20?)
7. Repeatability: Within ±0.2% F.S. (20?)
8. Operating differential pressure
- 5400: F.S. ? 5 SLM: 50–300 kPa
- 5410: F.S.> 5 SLM: 100–300 kPa –
9. Allowable operating pressure
- 5400: 300 kPa (G) or less
10. Proof pressure: 980 kPa (G)
11. Leak rate: 1 × 10-11 Pa•m3/s or less
12. Allowable ambient temperature : 0–50? (Accuracy guaranteed at 15–35?, ±0.1% F.S./?)
13. Allowable ambient humidity: 10–90% (No condensation allowed)
14. Materials of parts in contact with gases :
- Body: SUS316L
- Diaphragm: Ni-Co
- Valve seat: PTFE
- Sealing: SUS316L, Ni
15. Electric connection :
- Dsub 9-pin connector as per KFC Standard (Compliant with SEMI Standard)
16. Flow rate input signals :
- 5400 : 0–5 VDC (Input impedance: 1 M? or more) 5410 : –
17. Flow rate output signals : 0–5 VDC (Minimum load resistance: 250 k? or more)
18. Required power supply :
- 5400 : +15 VDC (±5%) 100 mA, ?15VDC (±5%) 200mA
- 5410 : +15 VDC (±5%) 100 mA,?15VDC (±5%) 100mA
19. Joint (Main unit bore) : Standard: 1/4 VCR equivalent Option: 1/4 SWL
20. Weight
- 5400: Approx. 1000 g
- 5410 : Approx. 800 g
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